COMPUTER NANOSCOPY – STATE AND PERSPECTIVES

  • Антон Сергійович Шантир National Technical University of Ukraine "Kyiv Polytechnic Institute
  • Діана Сергіївна Шантир National Technical University of Ukraine "Kyiv Polytechnic Institute

Abstract

Modern instruments for nanoscopy were reviewed and analyzed. Substantiated usage of scanning electron microscopes as instruments for nanoscale objects linear dimensions measuring. Considered basic instruments and methods for scanning electron microscopes accuracy characteristics estimation.

Author Biographies

Антон Сергійович Шантир, National Technical University of Ukraine "Kyiv Polytechnic Institute

Graduate student

Діана Сергіївна Шантир, National Technical University of Ukraine "Kyiv Polytechnic Institute

Candidate of Technical Sciences, Associate Professor

Published
2019-02-23
How to Cite
Шантир, А., & Шантир, Д. (2019). COMPUTER NANOSCOPY – STATE AND PERSPECTIVES. Electrotechnic and Computer Systems, (8(84), 72-79. Retrieved from https://eltecs.op.edu.ua/index.php/journal/article/view/1247
Section
Computer Systems, Networks and their Components